Magnetron Construction
Magnetron Construction
Each Angstrom Sciences Magnetron Sputtering Cathode is machined from solid 304 Stainless Steel, Aircraft Grade 6061 Aluminum and OFHC Copper, ensuring magnetic and electrical integrity for long-term, reliable operation. Their low-impedance design provides RF, DC, Mid-Frequency DC, Pulse DC, HiPIMS and Microwave power compatibility.
The solid anode shield permits operation at lower voltage and pressure, maintaining an accurate distance between the cathode and anode (ground plane). The anode shield also prevents debris from falling in the space between the anode and the cathode, preventing electrical short circuits and arcing.
A solid magnet array is used that provides an extremely uniform magnetic field that results in a highly uniform thin film.
Angstrom Sciences uses ISO NW standard fittings as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and can be accessed through standard O-ring compression fittings for ease of installation in any vacuum system.
The solid construction and design tolerances ensure stable and repeatable operational performance through target life and from target to target providing greater yields over process lifetime.
