PVD Coating Research & Development
In order to satisfy a corporate mission to deliver cutting edge products and provide unparalleled customer support and service, Angstrom Sciences maintains a fully staffed and equipped Applications Laboratory.
Staffed by scientists and engineers with decades of experience, the laboratory serves as the test bed for all new magnetron designs, performance verification testing, and thin film process development. All new Angstrom Sciences products are thoroughly tested in the laboratory to ensure that every element of product performance criteria is met before any deliveries to a customer are made. Many of our customers contract with the facility to establish baseline processes for new materials/products as well as verify the integrity of proposed approaches to manufacturing implementation.
The capabilities of the Application Laboratory include:
Lab Deposition Equipment:
Custom Batch System with substrate planetary, substrate heating
– CTI Cryogenic Pump
– Plasus EMICON Plasma Emission Monitor
– MKS Pressure Control system
Custom Linear System: (80” x 15” x 24”) w/ substrate carousel
– CTI Cryogenic Pump
– MKS Pressure Control
Custom Linear System (84” x 12”x 36”) Single-side load lock, with substrate scanning
– CTI Cryogenic Pump
– Leybold WS100/DK50 Blower Package
– MKS Pressure Control
Power Supplies:
– AE RFXII 1250W RF Power Supply and Matching Network
– AE RFXII 5500W RF Power Supply and Matching Network
– AE RFX 600 RF Power Supply and Matching Network
– AE Pinnacle Plus 10kW DC Power Supply
– AE Pinnacle 20kW DC Power Supply
– AE MDX 1K 1kW DC Power Supply -4-
– AE MDX10 10kW DC Power Supply -10-
– Z Shengpu MS-30K 30kW DC Power Supply
Ultrasonic Bath: Substrate Cleaning
Analytical – Optical Metrology:
Ocean Optics Spectrophotometer UV-NIR
Perkin Elmer Spectrophotometer UV- NIR
Gretag MacBeth Densitometer
Analytical – Electrical Metrology:
Guardian 4pt probe (10-100 ohm/sq,)
XY Axis Automated Mapping Magnetic Field (Bx, By, Bz)
[accommodates linear and cylindrical magnetrons]
Analytical – Physical Metrology:
Dektak® 3030 surface profilometer
XY Axis Automated Mapping Displacement (Target Erosion)
[Both Linear and Cylindrical Magnetrons]
For more information regarding Coatiing Lab Services or to discuss your project, call 412-469-8466 contact us online.
