Confocal Sputtering

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Confocal Sputtering

Confocal or Combinatorial Sputtering is a technique where a relatively small sputtering cathode is tilted off normal and directed to a spot on a rotating substrate. This approach, due to the off-axis orientation of the substrate to the sputter head produces very uniform films on substrates ranging up to twice the diameter of the magnetron. In this arrangement multiple sources can be configured to deposit simultaneously on a single rotating substrate providing a very effective way to develop compound thin films.

Having the ability to adjust the tilt, source to substrate distance and center axis of the sputtering head provides you with more flexibility in a variety of sputtering applications and allows you to better optimize the uniformity of the coating.

Angstrom Sciences offers a variety of circular and linear magnetrons that can be used in confocal sputtering applications. These magnetrons feature an angular tilt head that can be adjusted for optimal coverage angle of the target relative to the substrate.

Optional feedthroughs and flange configurations are available that allow easy adjustment of the cathode to the substrate distance without breaking the vacuum.

Shutters, cross contamination shields and gas inlets can also be provided for a complete confocal assembly.

Angstrom Sciences also supplies a Confocal Alignment Tool to make easy and precise adjustments with minimal time when tuning multiple cathodes for optimizing uniformity.

Common Cathode Accessories and Configurations Include

Shutters	Cross Contamination Shields	Insertion lengths
In-Situ Tilt	Gas Inlet Assemblies	Linear Motion Actuators

Angstrom Science manufactures magnetron sputtering cathodes for a wide range of coating applications. Our magnetrons are custom designed to provide superior magnetic performance and highly efficient thermal conductivity essential in creating a high quality uniform thin film.