Threaded Target Clamp
Threaded Target Clamp
One of the challenges facing sputtering is how to affix the target to the magnetron device. In general, sputtering targets are either fastened directly to the cathode body or they are bonded directly to a plate commonly referred to as a “backing plate” which is in turn, fastened to the cathode body. Typically, screws are used to fasten the target or target/backing plate assembly in place, but this adds to the overall diameter of the magnetron sputtering cathode.
Angstrom Sciences’ threaded target clamp design for circular magnetrons was initially developed to create large, multiple-cathode assemblies for confocal sputtering. This threaded design reduces the overall size of a cathode for a given target diameter and, within cluster assemblies, provides a smaller angle of incidence to the substrate, resulting in better uniformity and rates.
Angstrom Sciences offers this unique solution for their circular magnetron product line in that the target clamp threads onto the cathode body using a proprietary fine pitch thread. This approach provides for uniform clamping pressures and accommodates targets of varying thickness. Contrasted to the standard industry approach of recessed target clamps that require small screws to fix a counter-bored clamp which requires the target to be machined to a fixed thickness.
Threaded target clamping provides flexibility within a client’s application, allowing for variations in target thickness. Target changes are quick and easy without the use of ancillary tools or devices, minimizing system downtime.
For more information regarding Threaded Target Clamps or to discuss your project, call +1-412-469-8466 or contact us online.
