Linear Magnetron
Patented Advantages
Angstrom Sciences’ linear magnetrons incorporate our fully encapsulated patented, profiled NdFeB rare earth magnets that spread the field across the entire target surface increasing target utilization and minimizing particulate contamination form the target surface. Turbulent water flow is also featured in all our magnetron sputtering cathodes to provide optimal thermal transfer and minimizing non-uniformity due to hot spots on the target surface. These along with features like integral process gas inlets, solid anode walls, and the use of cutting-edge materials ensures unparalleled performance and reliability for your sputtering process.
Description
As more industries discover the speed, controllability, and bottom-line performance of magnetron sputtering, Angstrom Sciences is developing tools to maximize the output of these larger, faster manufacturing processes.
Bigger Solutions
For those who must coat extremely wide substrates or must achieve extremely high throughput, linear magnetrons offer the perfect in-line solution.
Total Power Compatibility
Low-impedance heads provide RF, DC, Mid-Frequency DC, Pulsed DC, HiPIMS and Microwave power compatibility.
Standard Fittings
We can use ISO NW standard fittings, Conflat® metal seal flanges or custom O-ring sealed flanges for mounting. All utilities are typically maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system.
Proven Performance
These magnetrons deliver the unparalleled performance that has made Angstrom Sciences the standard of the industry. Operation at extremely low pressure and exceptionally high power densities provides you with the perfect balance of uniformity, utilization and rate in any application.
Going to any Length
Angstrom Sciences linear cathodes are available in a full range of target widths from 1″/25mm to 16″/406mm and lengths up to 185″/4700mm. And, of course, we are fully equipped to design and build custom magnetrons for any of your production needs.
Total Commitment
All Angstrom Sciences’ magnetrons are guaranteed against defects in workmanship and materials for two full years. Magnetrons are our core business, and we stand ready to ensure your satisfaction.
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For more information on Linear Magnetrons, call us at +1-412-469-8466 or contact us online.