Introducing the ONYX-Revolution
Mark Bernick, President Richard Newcomb, R&D Manager - Angstrom Sciences, Inc.
40 South Linden St. Duquesne, PA, USA 15110
Home » Introducing the ONYX-Revolution
For Immediate Release:
Release Date :
15/11/2006 12:00 am
About Angstrom Sciences:
Angstrom Sciences is the world leader in magnetron technology which is used to produce thin films through the “sputtering” process. Sputtering is used to manufacture advanced high technology products, such as flat panel displays, energy efficient architectural glass, solar cells, fiber optic network components and microelectronic devices. The company has a worldwide business presence and is headquartered in Pittsburgh, PA.
Phone: +1-412-469-8466
For Immediate Release
Introducing the ONYX-Revolution™
As the need to maximize operating efficiency and minimize production costs continues to grow, manufacturers using thin film deposition processes seek equipment that will increase target utilization, product throughput and system ROI. Over the years, rotating cylindrical magnetrons have become commonplace in the architectural glass coating industry due to their inherent ability to hold more useable target material than a planar magnetron with the same spatial area, and their improved target utilization.
Now, Angstrom Sciences has developed the ONYX-REVOLUTION™ with a new magnet array design to improve rotating cylindrical magnetron performance in flat panel display and web coating applications.
Taking advantage of its profiled magnet design, Angstrom Sciences has improved the rotating cylindrical magnetron’s performance by creating a deposition profile that is closer to normal between the source and the substrate. The improved deposition profile offers reduced debris accumulation on the chamber walls, allowing for longer runtimes and higher throughput for industrial applications.
Further to this inherent power savings, the Angstrom Sciences magnet array offers a higher magnetic field intensity, which allows the sputtering process to run at lower power levels while maintaining typical deposition rates. Field-testing has verified a power savings of 20% and target utilization of 92%.
Angstrom Sciences has paired its standard robust design criteria with this high power supported cantilever rotating cylindrical magnetron, which comes equipped with:
The new patent pending technology, available in 6”, 5”, 4” diameters, is designed for in-line systems and is compatible with both horizontal and vertical applications.
Angstrom Sciences is the world leader in magnetron technology used to produce thin films through the “sputtering”process. Sputtering is used to manufacture advanced products, such as compact disks, energy efficient architectural glass, fiber optic network components and microelectronic devices. The company has a worldwide business presence and is headquartered in Pittsburgh, PA.