Sputtering Targets
From standard, single element materials to custom compounds, small circular to multi-tile and stepped constructions, commercial grade to ultra-high purities, Angstrom Sciences provides the highest quality magnetron sputtering target materials.
We utilize a variety of specialized processing techniques such as hot pressing, hot isostatic pressing (HIP), cold isostatic pressing (CIP), induction vacuum melting, and vacuum casting to produce homogenous, fine-grained, high-density materials that conform to the strictest application standards.
All sputtering targets are cleaned, inspected, chemically-tested, and packed under inert gas for immediate use in your vacuum system.
Angstrom Sciences provides a full range of sputtering target materials including: precious metals, pure metals, alloys, ceramics, cermets, borides, oxides, carbides, nitrides, silicides, and fluorides.
Purities range from commercial grade (99.5%) to ultra high (99.9999%).
| Material | Purity | Size | Part Number |
| Aluminum (Al) | 99.999% | 1" Diameter x .062" thick | PVD-1000254 |
| Aluminum (Al) | 99.999% | 1" Diameter x .125" thick | PVD-1000255 |
| Aluminum (Al) | 99.999% | 2" Diameter x .125" thick | PVD-1000062 |
| Aluminum (Al) | 99.999% | 2" Diameter x .250" thick | PVD-1000052 |
| Aluminum (Al) | 99.999% | 3" Diameter x .125" thick | PVD-1000096 |
| Aluminum (Al) | 99.999% | 3" Diameter x .250" thick | PVD-1000136 |
| Aluminum (Al) | 99.999% | 4'' Diameter x .125" thick | PVD-1000256 |
| Aluminum (Al) | 99.999% | 4" Diameter x .250" thick | PVD-1000257 |
| Aluminum (Al) | 99.999% | 6" Diameter x .250" thick | PVD-1000118 |
| Aluminum (Al) | 99.999% | 8" Diameter x .250" thick | PVD-1000187 |
| Aluminum Oxide (Al2O3) | 99.995% | 2" Diameter x .125" thick | PVD-1000266 |
| Aluminum Oxide (Al2O3) | 99.995% | 2" Diameter x .250" thick | PVD-1000084 |
| Aluminum Oxide (Al2O3) | 99.995% | 3" Diameter x .125" thick | PVD-1000025 |
| Aluminum Oxide (Al2O3) | 99.995% | 3" Diameter x .250" thick | PVD-1000268 |
| Aluminum Oxide (Al2O3) | 99.995% | 4'' Diameter x .125" thick | PVD-1000407 |
| Aluminum Oxide (Al2O3) | 99.995% | 4" Diameter x .250" thick | PVD-1000408 |
| Al2O3 2x125 Assembly | 99.995% | Bonded Target Assembly 2" | PVDA-1000126 |
| Al2O3 3x125 Assembly | 99.995% | Bonded Target Assembly 3" | PVDA-1000006 |
| Al2O3 4x125 Assembly | 99.995% | Bonded Target Assembly 4" | PVDA-1000160 |
| Carbon (Graphite) | 99.999% | 1" Diameter x .062" thick | PVD-1000410 |
| Carbon (Graphite) | 99.999% | 1" Diameter x .125" thick | PVD-1000128 |
| Carbon (Graphite) | 99.999% | 2" Diameter x .125" thick | PVD-1000409 |
| Carbon (Graphite) | 99.999% | 2" Diameter x .250" thick | PVD-1000276 |
| Carbon (Graphite) | 99.999% | 3" Diameter x .125" thick | PVD-1000412 |
| Carbon (Graphite) | 99.999% | 3" Diameter x .250" thick | PVD-1000277 |
| Carbon (Graphite) | 99.999% | 4'' Diameter x .125" thick | PVD-1000413 |
| Carbon (Graphite) | 99.999% | 4" Diameter x .250" thick | PVD-1000278 |
| Carbon (Graphite) | 99.999% | 6" Diameter x .250" thick | PVD-1000279 |
| Carbon (Graphite) | 99.999% | 8" Diameter x .250" thick | PVD-1000079 |
| Chromium (Cr) | 99.95% | 2" Diameter x .125" thick | PVD-1000369 |
| Chromium (Cr) | 99.95% | 2" Diameter x .250" thick | PVD-1000040 |
| Chromium (Cr) | 99.95% | 3" Diameter x .125" thick | PVD-1000414 |
| Chromium (Cr) | 99.95% | 3" Diameter x .250" thick | PVD-1000041 |
| Chromium (Cr) | 99.95% | 4'' Diameter x .125" thick | PVD-1000415 |
| Chromium (Cr) | 99.95% | 4" Diameter x .250" thick | PVD-1000416 |
| Cobalt (Co) | 99.95% | 2" Diameter x .010'' thick | PVD-1000504 |
| Cobalt (Co) | 99.95% | 2" Diameter x .125'' thick | PVD-1000366 |
| Cobalt (Co) | 99.95% | 3" Diameter x .010'' thick | PVD-1000284 |
| Cobalt (Co) | 99.95% | 3" Diameter x .125'' thick | PVD-1000505 |
| Cobalt (Co) | 99.95% | 4" Diameter x .010" thick | PVD-1000285 |
| Cobalt (Co) | 99.95% | 4" Diameter x .125" thick | PVD-1000506 |
| Copper (Cu) | 99.99% | 2" Diameter x .125" thick | PVD-1000133 |
| Copper (Cu) | 99.99% | 2" Diameter x .250" thick | PVD-1000039 |
| Copper (Cu) | 99.99% | 3" Diameter x .125" thick | PVD-1000002 |
| Copper (Cu) | 99.99% | 3" Diameter x .250" thick | PVD-1000024 |
| Copper (Cu) | 99.99% | 4'' Diameter x .125" thick | PVD-1000219 |
| Copper (Cu) | 99.99% | 4" Diameter x .250" thick | PVD-1000078 |
| Copper (Cu) | 99.99% | 6" Diameter x .125" thick | PVD-1000459 |
| Copper (Cu) | 99.99% | 6" Diameter x .250" thick | PVD-1000460 |
| Copper (Cu) | 99.99% | 8" Diameter x .125" thick | PVD-1000461 |
| Copper (Cu) | 99.99% | 8" Diameter x .250" thick | PVD-1000462 |
| Gold (Au) | 99.99% | 1" Diameter x .060" thick | PVD-1000354 |
| Gold (Au) | 99.99% | 1" Diameter x .125" thick | PVD-1000355 |
| Gold (Au) | 99.99% | 2" Diameter x .060" thick | PVD-1000117 |
| Gold (Au) | 99.99% | 2" Diameter x .125" thick | PVD-1000017 |
| Gold (Au) | 99.99% | 2" Diameter x .250" thick | PVD-1000388 |
| Gold (Au) | 99.99% | 3" Diameter x .060" thick | PVD-1000353 |
| Gold (Au) | 99.99% | 3" Diameter x .125" thick | PVD-1000245 |
| Gold (Au) | 99.99% | 3" Diameter x .250" thick | PVD-1000510 |
| Gold (Au) | 99.99% | 4" Diameter x .060" thick | PVD-1000512 |
| Gold (Au) | 99.99% | 4" Diameter x .125" thick | PVD-1000173 |
| Gold (Au) | 99.99% | 4" Diameter x .250" thick | PVD-1000511 |
| Indium (In) | 99.99% | 2" Diameter x .125" thick | PVD-1000418 |
| Indium (In) | 99.99% | 2" Diameter x .250" thick | PVD-1000419 |
| Indium (In) | 99.99% | 3" Diameter x .125" thick | PVD-1000417 |
| Indium (In) | 99.99% | 3" Diameter x .250" thick | PVD-1000540 |
| Indium (In) | 99.99% | 4'' Diameter x .125" thick | PVD-1000421 |
| Indium (In) | 99.99% | 4" Diameter x .250" thick | PVD-1000422 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 2" Diameter x .125" thick | PVD-1000423 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 2" Diameter x .250" thick | PVD-1000208 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 3" Diameter x .125" thick | PVD-1000006 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 3" Diameter x .250" thick | PVD-1000299 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 4'' Diameter x .125" thick | PVD-1000424 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 4" Diameter x .250" thick | PVD-1000300 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 6" Diameter x .250" thick | PVD-1000425 |
| ITO (In2O3-SnO2-90/10 wt%) | 99.99% | 8" Diameter x .250" thick | PVD-1000426 |
| Iron (Fe) | 99.95% | 2" Diameter x .010" thick | PVD-1000168 |
| Iron (Fe) | 99.95% | 2" Diameter x .040" thick | PVD-1000503 |
| Iron (Fe) | 99.95% | 3" Diameter x .010'' thick | PVD-1000501 |
| Iron (Fe) | 99.95% | 3" Diameter x .040" thick | PVD-1000502 |
| Iron (Fe) | 99.95% | 4" Diameter x .010" thick | PVD-1000193 |
| Iron (Fe) | 99.95% | 4" Diameter x .040" thick | PVD-1000194 |
| Molybdenum (Mo) | 99.95% | 2" Diameter x .125" thick | PVD-1000427 |
| Molybdenum (Mo) | 99.95% | 2" Diameter x .250" thick | PVD-1000051 |
| Molybdenum (Mo) | 99.95% | 3" Diameter x .125" thick | PVD-1000428 |
| Molybdenum (Mo) | 99.95% | 3" Diameter x .250" thick | PVD-1000286 |
| Molybdenum (Mo) | 99.95% | 4'' Diameter x .125" thick | PVD-1000429 |
| Molybdenum (Mo) | 99.95% | 4" Diameter x .250" thick | PVD-1000287 |
| Niobium (Nb) | 99.95% | 2" Diameter x .125" thick | PVD-1000007 |
| Niobium (Nb) | 99.95% | 2" Diameter x .250" thick | PVD-1000289 |
| Niobium (Nb) | 99.95% | 3" Diameter x .125" thick | PVD-1000011 |
| Niobium (Nb) | 99.95% | 3" Diameter x .250" thick | PVD-1000290 |
| Niobium (Nb) | 99.95% | 4'' Diameter x .125" thick | PVD-1000430 |
| Niobium (Nb) | 99.95% | 4" Diameter x .250" thick | PVD-1000431 |
| Nickel (Ni) | 99.99% | 2" Diameter x .020" thick | PVD-1000044 |
| Nickel (Ni) | 99.99% | 2" Diameter x .060" thick | PVD-1000302 |
| Nickel (Ni) | 99.99% | 2" Diameter x .125" thick | PVD-1000303 |
| Nickel (Ni) | 99.99% | 3" Diameter x .020" thick | PVD-1000045 |
| Nickel (Ni) | 99.99% | 3" Diameter x .060" thick | PVD-1000432 |
| Nickel (Ni) | 99.99% | 3" Diameter x .125" thick | PVD-1000346 |
| Nickel (Ni) | 99.99% | 4" Diameter x .020" thick | PVD-1000095 |
| Nickel (Ni) | 99.99% | 4" Diameter x .060" thick | PVD-1000433 |
| Nickel (Ni) | 99.99% | 4" Diameter x .125" thick | PVD-1000094 |
| Nickel (Ni) | 99.99% | 6" Diameter x .250" thick | PVD-1000434 |
| Nickel (Ni) | 99.99% | 8" Diameter x .250" thick | PVD-1000435 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 2" Diameter x .125" thick | PVD-1000436 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 2" Diameter x .250" thick | PVD-1000288 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 3" Diameter x .125" thick | PVD-1000437 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 3" Diameter x .250" thick | PVD-1000085 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 4'' Diameter x .125" thick | PVD-1000438 |
| Nickel-Chromium(80/20 wt%) | 99.95% | 4" Diameter x .250" thick | PVD-1000439 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 2" Diameter x .125" thick | PVD-1000440 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 2" Diameter x .250" thick | PVD-1000361 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 3" Diameter x .125" thick | PVD-1000441 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 3" Diameter x .250" thick | PVD-1000442 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 4'' Diameter x .125" thick | PVD-1000443 |
| Nickel-Vanadium (93/7 wt%) | 99.95% | 4" Diameter x .250" thick | PVD-1000444 |
| Palladium (Pd) | 99.95% | 1" Diameter x .060" thick | PVD-1000519 |
| Palladium (Pd) | 99.95% | 1" Diameter x .125" thick | PVD-1000520 |
| Palladium (Pd) | 99.95% | 2" Diameter x .125" thick | PVD-1000521 |
| Palladium (Pd) | 99.95% | 2" Diameter x .250" thick | PVD-1000522 |
| Palladium (Pd) | 99.95% | 3" Diameter x .125" thick | PVD-1000522 |
| Palladium (Pd) | 99.95% | 3" Diameter x .250" thick | PVD-1000524 |
| Palladium (Pd) | 99.95% | 4'' Diameter x .125" thick | PVD-1000525 |
| Palladium (Pd) | 99.95% | 4'' Diameter x .250" thick | PVD-1000526 |
| Platinum (Pt) | 99.99% | 1" Diameter x .060" thick | PVD-1000513 |
| Platinum (Pt) | 99.99% | 1" Diameter x .125" thick | PVD-1000057 |
| Platinum (Pt) | 99.99% | 2" Diameter x .060" thick | PVD-1000088 |
| Platinum (Pt) | 99.99% | 2" Diameter x .125" thick | PVD-1000089 |
| Platinum (Pt) | 99.99% | 2" Diameter x .250" thick | PVD-1000090 |
| Platinum (Pt) | 99.99% | 3" Diameter x .060" thick | PVD-1000515 |
| Platinum (Pt) | 99.99% | 3" Diameter x .125" thick | PVD-1000049 |
| Platinum (Pt) | 99.99% | 3" Diameter x .250" thick | PVD-1000516 |
| Platinum (Pt) | 99.99% | 4" Diameter x .060" thick | PVD-1000514 |
| Platinum (Pt) | 99.99% | 4'' Diameter x .125" thick | PVD-1000517 |
| Platinum (Pt) | 99.99% | 4'' Diameter x .250" thick | PVD-1000518 |
| Silicon (Boron Doped) | 99.999% | 2" Diameter x .125" thick | PVD-1000126 |
| Silicon (Boron Doped) | 99.999% | 2" Diameter x .250" thick | PVD-1000310 |
| Silicon (Boron Doped) | 99.999% | 3" Diameter x .125" thick | PVD-1000001 |
| Silicon (Boron Doped) | 99.999% | 3" Diameter x .250" thick | PVD-1000316 |
| Silicon (Boron Doped) | 99.999% | 4'' Diameter x .125" thick | PVD-1000127 |
| Silicon (Boron Doped) | 99.999% | 4" Diameter x .250" thick | PVD-1000317 |
| Silicon (Boron Doped) | 99.999% | 6" Diameter x .250" thick | PVD-1000003 |
| Silicon (Boron Doped) | 99.999% | 8" Diameter x .250" thick | PVD-1000321 |
| Silicon 2x125 Assembly | 99.999% | Bonded Target Assembly 2'' | PVDA-1000054 |
| Silicon 3x125 Assembly | 99.999% | Bonded Target Assembly 3" | PVDA-1000001 |
| Silicon 4x125 Assembly | 99.999% | Bonded Target Assembly 4" | PVDA-1000055 |
| Silicon Dioxide (SiO2) | 99.995% | 2" Diameter x .125" thick | PVD-1000373 |
| Silicon Dioxide (SiO2) | 99.995% | 2" Diameter x .250" thick | PVD-1000209 |
| Silicon Dioxide (SiO2) | 99.995% | 3" Diameter x .125" thick | PVD-1000241 |
| Silicon Dioxide (SiO2) | 99.995% | 3" Diameter x .250" thick | PVD-1000223 |
| Silicon Dioxide (SiO2) | 99.995% | 4'' Diameter x .125" thick | PVD-1000445 |
| Silicon Dioxide (SiO2) | 99.995% | 4" Diameter x .250" thick | PVD-1000446 |
| SiO2 2x125 Assembly | 99.995% | Bonded Targer Assembly 2" | PVDA-1000163 |
| SiO2 3x125 Assembly | 99.995% | Bonded Target Assembly 3" | PVDA-1000090 |
| SiO2 4x125 Assembly | 99.995% | Bonded Target Assembly 4" | PVDA-1000164 |
| Silver (Ag) | 99.99% | 1" Diameter x .060" thick | PVD-1000507 |
| Silver (Ag) | 99.99% | 1" Diameter x .125" thick | PVD-1000270 |
| Silver (Ag) | 99.99% | 2" Diameter x .125" thick | PVD-1000053 |
| Silver (Ag) | 99.99% | 2" Diameter x .250" thick | PVD-1000389 |
| Silver (Ag) | 99.99% | 3" Diameter x .125" thick | PVD-1000243 |
| Silver (Ag) | 99.99% | 3" Diameter x .250" thick | PVD-1000508 |
| Silver (Ag) | 99.99% | 4'' Diameter x .125" thick | PVD-1000092 |
| Silver (Ag) | 99.99% | 4'' Diameter x .250" thick | PVD-1000093 |
| Tantalum (Ta) | 99.95% | 2" Diameter x .125" thick | PVD-1000225 |
| Tantalum (Ta) | 99.95% | 2" Diameter x .250" thick | PVD-1000447 |
| Tantalum (Ta) | 99.95% | 3" Diameter x .125" thick | PVD-1000448 |
| Tantalum (Ta) | 99.95% | 3" Diameter x .250" thick | PVD-1000449 |
| Tantalum (Ta) | 99.95% | 4'' Diameter x .125" thick | PVD-1000450 |
| Tantalum (Ta) | 99.95% | 4" Diameter x .250" thick | PVD-1000451 |
| Tin (Sn) | 99.999% | 2" Diameter x .125" thick | PVD-1000532 |
| Tin (Sn) | 99.999% | 2" Diameter x .250" thick | PVD-1000376 |
| Tin (Sn) | 99.999% | 3" Diameter x .125" thick | PVD-1000531 |
| Tin (Sn) | 99.999% | 3" Diameter x .250" thick | PVD-1000530 |
| Tin (Sn) | 99.999% | 4'' Diameter x .125" thick | PVD-1000533 |
| Tin (Sn) | 99.999% | 4" Diameter x .250" thick | PVD-1000534 |
| Titanium(Ti) | 99.995% | 2" Diameter x .125" thick | PVD-1000008 |
| Titanium(Ti) | 99.995% | 2" Diameter x .250" thick | PVD-1000081 |
| Titanium(Ti) | 99.995% | 3" Diameter x .125" thick | PVD-1000012 |
| Titanium(Ti) | 99.995% | 3" Diameter x .250" thick | PVD-1000165 |
| Titanium(Ti) | 99.995% | 4'' Diameter x .125" thick | PVD-1000309 |
| Titanium(Ti) | 99.995% | 4" Diameter x .250" thick | PVD-1000077 |
| Titanium(Ti) | 99.6% | 2" Diameter x .125" thick | PVD-1000306 |
| Titanium(Ti) | 99.6% | 2" Diameter x .250" thick | PVD-1000082 |
| Titanium(Ti) | 99.6% | 3" Diameter x .125" thick | PVD-1000215 |
| Titanium(Ti) | 99.6% | 3" Diameter x .250" thick | PVD-1000307 |
| Titanium(Ti) | 99.6% | 4'' Diameter x .125" thick | PVD-1000453 |
| Titanium(Ti) | 99.6% | 4" Diameter x .250" thick | PVD-1000458 |
| Tungsten (W) | 99.95% | 2" Diameter x .125" thick | PVD-1000367 |
| Tungsten (W) | 99.95% | 2" Diameter x .250" thick | PVD-1000083 |
| Tungsten (W) | 99.95% | 3" Diameter x .125" thick | PVD-1000455 |
| Tungsten (W) | 99.95% | 3" Diameter x .250" thick | PVD-1000456 |
| Tungsten (W) | 99.95% | 4'' Diameter x .125" thick | PVD-1000457 |
| Tungsten (W) | 99.95% | 4" Diameter x .250" thick | PVD-1000458 |
| Zinc (Zn) | 99.99% | 2" Diameter x .125" thick | PVD-1000387 |
| Zinc (Zn) | 99.99% | 2" Diameter x .250" thick | PVD-1000375 |
| Zinc (Zn) | 99.99% | 3" Diameter x .125" thick | PVD-1000098 |
| Zinc (Zn) | 99.99% | 3" Diameter x .250" thick | PVD-1000099 |
| Zinc (Zn) | 99.99% | 4'' Diameter x .125" thick | PVD-1000529 |
| Zinc (Zn) | 99.99% | 4" Diameter x .250" thick | PVD-1000528 |
| Zirconium (Zr) | 99.2% | 2" Diameter x .125" thick | PVD-1000009 |
| Zirconium (Zr) | 99.2% | 2" Diameter x .250" thick | PVD-1000537 |
| Zirconium (Zr) | 99.2% | 3" Diameter x .125" thick | PVD-1000013 |
| Zirconium (Zr) | 99.2% | 3" Diameter x .250" thick | PVD-1000186 |
| Zirconium (Zr) | 99.2% | 4'' Diameter x .125" thick | PVD-1000538 |
| Zirconium (Zr) | 99.2% | 4" Diameter x .250" thick | PVD-1000539 |
Click Here for a Complete List of Sputtering Target Materials
For more information about Sputtering Tragets, call 412-469-8466 or contact us online.