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Plasus Plasma Analysis and Process Control

Process flow controllers are high-speed closed-loop process gas controllers, designed for real-time, in-situ precision control of reactive sputtering-based vacuum coating and plasma treatment processes. They are complete, compact, flexible, convenient to use, and economical solutions which can be readily integrated into new as well as existing systems. Equally at home in production or R&D tools, process flow controllers can bring about demonstrable improvements in process stability, repeatability, and yield. A wide range of accessories are available including sensors specifically designed for HIPMS Sputtering Applications.

Process control is essential in industrial plasma applications to ensure reliability and high quality of the process. Here, optical emission spectroscopy (OES) is a first choice technique since it does not affect the plasma and since real-time monitoring of several plasma species is possible. Our PLASUS EMICON systems come with all the features you need to analyze, optimize and control your plasma application.

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Description

PLASUS

 

Spectroscopic Plasma Monitor Systems………..

                           ……….Process control for industry and R&D

 

Plasus Emicon Angstrom

 

PLASUS is a leading manufacturer of spectroscopic plasma monitor systems. Founded 20 years ago, our core competence is the development of turn-key process control systems for industry and R&D applications. Our systems are applied for plasma monitoring, process control, process optimization, quality control and spectroscopic plasma analysis.

Benefit from our many years of experience and leading industry know-how – we will be at your service and advise you comprehensively for your application!

 Angstrom Sciences’ broad experience and leading market position in planar and cylindrical magnetrons, places Angstrom at the forefront in offering the broadest industry range of performance and application specific designs in a complete package that provides a total solution for high performance reactive sputtering processes. Angstrom Sciences can also provide on-site process support and integration of the process flow systems providing our customers with both hardware and fully integrated solutions. Please contact our sales group  for specific options and further details.

Plasus Emicon Sensors AngstromPlasus Emicon Angstrom

SYSTEM FEATURES:

 

Broad band spectrum acquisition

The broad band spectrometer modules of the system acquire continuously complete spectra of the plasma light emission from 200 to 1100 nm.

 

Real time monitoring of plasma emission

Light emission from process relevant plasma particles is observed and tracked in real time. This allows a continuous monitoring of plasma conditions and changes are realized instantaneously.

 

Process optimization

Real-time monitoring gives the capability to optimize the plasma process by taking advantage of the instant system response on parameter changes.

 

Process control

Analog and digital outputs and inputs are available to install open and closed loop control functions. This feature can be used, for example, for end-point detection or for monitoring deviations from standard plasma process conditions. The integrated digital PID control function gives direct access to applications where closed loop control is necessary such as gas flow control or power control in reactive sputtering applications.

 

Multi-channel system

The EMICON MC and EMICON SA systems are available with up to 8 independent spectrometer channels. This enables e.g. multi-chamber process control or spatial resolved gas flow control in reactive sputtering applications.

 

Easy set-up for industrial environments

All parts of the system are designed to work in industrial conditions. The EMICON SA system for stationary production lines is managed by LAN interface. The USB 2.0 connectivity of the EMICON MC system makes this system the first choice for mobile use at different application.

 

Industrial interfaces PROFIBUS and LAN

All EMICON models can be extended by the industrial interfaces PROFIBUS and LAN for easy integration in industrial applications.

 

Type series

There are several EMICON series which satisfy different application types:

EMICON MC:   multi-channel standard system for plasma monitoring and process control.
EMICON SA:   stand-alone system with integrated process unit for process control in production lines.
EMICON HR:   spectral high-resolution system for detailed plasma analysis and plasma monitoring.

 

EMICON MC / HR Brochure

EMICON SA Brochure

EMICON MC / SA / HR Data Sheets

EMICON SpecLine Brochure

Emicon SpecLine Database for A /AM/ AMS

EMICON Vacuum Optics Brochure

EMICON Vacuum Optics Data Sheet

EMICON SpecLine Software Download Trial

EMICON Application Questionnaire

EMICON Optics Setup Diagram

 

Vacuum-Optics Specline-Software Emicon MC

 


 

For more information about Plasus Reactive Gas Controls, Call 412-469-8466 or email info@angstromsciences.com

 

Angstrom Management

product manager for PVD Materials, magnetrons, and vacuum deposition systems. During his tenure

 

Mr. Bernick designed and manufactured a full line of systems including resistive evaporation, electron beam evaporation, chemical vapor deposition, and magnetron sputtering systems.

 

In 1988, Mr. Bernick founded Angstrom Sciences, Inc. The company supplied PVD Materials and specialized in designing circular cluster assemblies with unique geometries for superconductivity research. Since then, the ONYX® -series has developed into a full line of circular, linear, and cylindrical magnetron sputtering cathodes for research and development through full-production industrial applications.

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Sales Management

Customer Service, and Supply Chain, and is an accomplished business leader with proven results managing global brands through the utilization of strong market and industry knowledge, designing effective product strategies and championing exceptionally successful teams.

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Angstrom Management

issues, coordinates procedural manuals and shipping for all Angstrom Sciences’ products.

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Sales Management

product line. Mr. Bachman is an expert in PVD materials and offers support through our worldwide distribution network. Prior to joining the company in 2004, Mr. Bachman worked for seven years

 

as an Inside Sales Specialist and Corporate Buyer for TW Metals, a nationwide full-line service center and distributor.

 

Mr. Bachman has over 20 years of experience in the materials industry and holds a B.A. in Economics from the University of Pittsburgh.

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Sales Management

lines. His main areas of focus are on Sales and Customer Service Providing exceptional support to customers both directly and through our Global Distribution Network. Before joining the company in 2023 Patrick worked for FedEx, and his prior experience with Logistics is beneficial to our commitment to timely delivery both domestically and internationally.

 

Mr. Werkmeister holds a B.S. in Marketing from Kent State University.

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Production Management

in October 2004 and was promoted to the position of Assembly Supervisor in 2019. As supervisor, Craig oversees a team of assembly personnel to ensure the accuracy, quality, and on-time delivery of all fulfilled orders.

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Production Management

Computer Design as well as Machine Design. Mr. Bruce has designed everything from small hand powered tools to Continuous Barge Unloaders, and Rotary Railcar Dumpers. Mr. Bruce holds an Associates Degree in Computer Aided Design from PTI.

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